• Home
• Refurbished Equipment
• Repair Service
• GreenChip Service
• Contact

Used MKS ENI RF Power Supplies

Model kHz kWatts Rebuilt DPGS-10 250* 1.25 $4,500 DPGD-10 250* 1.25 $5,500 HF-300 - .300 $1,300 HF-650 - .650 $1,800 LPG-6A 90-460 .600 $1,700 LPG-12A 90-460 1.2 $2,500

Model kHz kWatts Rebuilt Nova-25A - 2.5 ask Nova-50A - 5 ask PL1-HF 90-460 .750 ask PL2-HF 90-460 2 ask PL3-HF 90-460 3 ask Quanta-10 350 .900x2 $3,500 RFC-5MW - - ask

These MKS ENI sources will be rebuilt and tested with a 90 day warranty.

The DPG is a dual output generator for RF and also * up to 500V DC.

PL 1-HF & 2-HF

• Frequency range: 90 - 460 kHz
• RF output impedance: 50 - 600 ohms
• Power leveling: forward or load (plasma)
• AC power line: 115 VAC �8%, 20 A, 50-60 Hz
• Plasma matching: built-in variable 7-position step transformer for plasma impedances between 50 and 600 ohms.
• Mismatch protection: up to 200W before shutdown
• Control interface: type D, 9-pin connector
• RF output connector: Type C
• Size: 8.75" H x 17" W x 20.3"
• Weight: 46 lbs
• The ENI Plasmaloc HF2 software version is 1.21

MKS ENI RF Power Supply Service

We provide repair service for the following models:

• DPGS-10
• DPGD-10
• HF-300
• HF-650
• LPG-6A
• LPG-12A
• Nova-50
• PL1-HF
• PL2-HF
• PL3-HF
• Quanta-10
• RFC-5MW
• GHW-12A
• GHW12A
• GHW-12Z
• GHW12Z
• GMW-25A
• GMW25A
• GMW-25Z
• GMW25Z
• GHW-50A
• GHW50A
• GMW-50A
• GMW50A
• GHW-55A
• GHW55A
• GHW-58A
• GHW58A
• GHW-85A
• GHW85A

Call for a quote. 90 day warranty service on all MKS ENI RF power supplies.